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Kyoto University Microstructural Characterization Platform Shared Equipment


Shared Equipment 1

Ultralow-temperature high-resolution transmission electron microscope / JEOL JEM-2100F(G5)

    
photo of TEM  
Resolution
0.2 nm
Acceleration voltage
200 kV
Helium stage
He holding time:4 hours
Electron Gun
ZrO/W(100)FEG
CCD camera
2048x2048 pixel
Characteristics
Sample temperature is held at liquid He temperature during the observation. This cryo-TEM has "cryo-transfer system" so that sample can be inserted into sample stage without exposure to air after quick quenching.


Shared Equipment 2

Spherical-aberration-corrected transmission electron microscope / JEOL JEM-2200FS + CETCOR

photo of TEM
Resolution
0.1 nm (Cs-corrected)
Acceleration voltage
200 kV
Electron spectrometer
Ω-type filter / Energy resolution 0.8 eV
Electron gun
ZrO/W(100) Schottky-type
CCD camera
2048x2048 pixel
Cs corrector
CEOS CETCOR Cs corrector (TEM mode)
Characteristics
It can be used as both of TEM and STEM. It is an analytical TEM for general purpose with sample heating holder, low temperature holder and so on.


Shared Equipment 3

Monochromated atomic resolution analytical electron microscope / JEOL JEM-ARM200F + Double Wien filter + CETCOR and CESCOR

Acceleration voltage
200 kV, 60 kV
Monochrometer
Double Wien filter
Cs corrector
CEOS CETCOR + CESCOR
Energy filter
Gatan 966 QuantumERS
EDX
JED-2300T SDD100GV (JEOL)
Characteristics
It can carry out elemental mapping by using EDX at atomic resolution and EELS measurement at high energy resolution.


Shared Equipment 4

Focused ion beam machining apparatus / JEOL JEM-9310FIB

Ga ion source
5~30kV
Sample stage
TEM holder stage・Bulk sample stage
Max current
10 nA
Resolution
8nm
Characteristics
FIB is an apparatus for cutting and thinning of comparatively hard EM samples like ceramics and metals by Ga ion beam sputtering.


Shared Equipment 5

Microtome apparatus / Leica ULTRACUT UCT

Stage
Cryo-stage(room temperature~liquid nitrogen temperature)、room temperature
Characteristics
Microtome is an apparatus for cutting and thinning of comparatively soft EM samples like organic materials by diamond knife.


Shared Equipment 6

Precise ion milling apparatus / Gatan Model691/PIPS

Ar ion gun
0.1~5 kV (2 modes)
Sample stage
Low temperature stage(room temperature~liquid nitrogen temperature)
Characteristics
This apparatus is used for the final fine polishing of the surfaces of the samples prepared by FIB and dimpling machine by Ar ion beam sputtering.


Shared Equipment 7

Dimpling apparatus / South Bay Technology D500i

Characteristics
This apparatus is used for the thinning of comparatively hard materials by dimpling after polishing with diamond paste.